Dr. Mirwais Aktary
Applied Nanotools Inc. is an integrated photonics foundry offering the NanoSOI fabrication service for multi-project wafer (MPW) and dedicated custom runs. Employing high-resolution 100 keV electron beam lithography, the distinguishing features of our fabrication service are rapid turnaround time (6 -8 weeks from design submission) and a critical dimension of 55 nm, enabling the fabrication of high-resolution on-chip devices (i.e., waveguides, sub-wavelength gratings). Since its inception in 2016, devices fabricated via the NanoSOI process have been featured in numerous peer-reviewed publications.